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Table of Contents
Vapor Silanation Rig
| PRIMO |
|---|
 |
| Tool Type: “Vacuum deposition chamber” |
| Location: “Microfluidics Lab” |
| Supervisor | Tool Lead |
| David Bothman | “WW Name” |
| (805) 893-4125 | (###) ###-#### |
| bothman@cnsi.ucsb.edu | “WW Email” |
| Description: “Vapor Silanation Rig” |
| Manufacturer: “TEXT HERE” |
Last Updated: 7/6/22 Haley
About
The vapor silanation rig is located in the first fume hood you see to your left when you walk in the door of the microfluidics lab, Elings 3430.
Safety Concerns
Trimethylchlorosilane is flammable, toxic, and reacts with water vapor. It can make you sick if inhaled and ignite if it reacts with air or water vapor. It may only be used in the vapor silination rig inside of a fume hood. Do not let the pressure inside the chamber exceed 15 in Hg. The silane valve must always be opened in a nitrogen atmosphere. Protective eyewear, a lab coat, and gloves must be worn. Make sure the fume hood is closed when you are not working inside of it. Do not handle the silane without consulting the MSDS.