plasma_cleaner
This is an old revision of the document!
Table of Contents
Harrick Plasma Cleaner PDC-32G
| Plasma Cleaner |
|---|
 |
| Tool Type: Surface treatment |
| Location: Microfluidics Lab |
| Description: Plasma cleaner |
| Manufacturer: Harrick |
About
The Harrick PDC-32G is a compact table top plasma cleaner for nanoscale surface cleaning and activation of small samples. The attached PlasmaFlo gas mixer allows for quantitative control of up to two different process gasses and monitoring of the vacuumed pressure within the chamber.
Safety Concerns
The plasma cleaner uses high frequency RF radiation. If you have a pacemaker or similar device, please consult your doctor before using.
Training Documentation
Recipes
Brian Dincau found that the following recipe works well for bonding PDMS to PDMS or Glass:
- Power - High
- Pressure - 440 to 460 mTorr
- Duration - 30s
- Nitrogen flow - adjust as needed to maintain desired pressure.
- Mate surfaces immediately after treatment, then transfer to an oven at 115C for 20 minutes.
Detailed Specifications
- 3 stage adjustable RF power settings
- Max RF power: 18W
- Chamber size: 3“ diameter x 6.5” Pyrex chamber
- Valve threads: 1/8 NPT
Reference Documentation
plasma_cleaner.1677279035.txt.gz · Last modified: 2023/02/24 22:50 by bdincau