plasma_cleaner
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Table of Contents
Harrick Plasma Cleaner PDC-32G
| Plasma Cleaner |
|---|
 |
| Tool Type: “Cleaning Tool” |
| Location: “Microfluidics Lab” |
| Description: Plasma Cleaner |
| Manufacturer: Harrick |
About
The Harrick PDC-32G is a compact table top plasma cleaner for nanoscale surface cleaning and activation of small samples. The attached PlasmaFlo gas mixer allows for quantitative control of up to two different process gasses and monitoring of the vacuumed pressure within the chamber.
Safety Concerns
Training Documentation
Recipes
Brian Dincau found that the following recipe does a good job enhancing PDMS-PDMS bonding:
- Power - High
- Pressure - 450 mTorr
- Duration - 30s
- Nitrogen flow - adjust as needed to maintain desired pressure.
Detailed Specifications
- 3 stage adjustable RF power settings
- Max RF power: 18W
- Chamber size: 3“ diameter x 6.5” Pyrex chamber
- Valve threads: 1/8 NPT
Reference Documentation
plasma_cleaner.1672887699.txt.gz · Last modified: 2023/01/05 03:01 by haley