spin_coater
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spin_coater [2022/06/23 19:16] – [Operating Procedures] bdincau | spin_coater [2023/07/11 16:52] (current) – rylin | ||
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- | ^ Laurell WS-650M | + | ^ Spin Coater |
| {{ : | | {{ : | ||
- | | **Tool Type: | + | | **Tool Type: |
- | | **Location: | + | | **Location: |
- | | **Supervisor** | ||
- | | David Bothman | ||
- | | (805) 893-4125 | ||
- | | bothman@cnsi.ucsb.edu | ||
| **Description: | | **Description: | ||
| **Manufacturer: | | **Manufacturer: | ||
+ | |||
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===== About ===== | ===== About ===== | ||
- | Insert Text Here! | + | Spin coaters facilitate the deposition of thin films by applying centrifugal force to flat substrates, such as wafers or microscope slides. Like most spin coaters, this one uses a vacuum chuck to hold the substrate while it spins. Recipes can be customized, with parameters for spin speed, acceleration rate, spin time, and multiple steps. |
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- | ===== Detailed Specifications | + | ===== Safety Concerns |
- | Insert Text Here! | + | **Pinching Hazard:** Be careful when closing and opening the spin coater lid. \\ |
+ | **High Velocity Debris:** By default, an interlock prevents the spin coater from operating while the lid is open. Nonetheless, | ||
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- | ===== Safety Concerns | + | ===== Training Documentation |
- | Insert Text Here! | + | {{ : |
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- | ===== Operating Procedures | + | ===== Detailed Specifications |
- | **__Training required for independent operation__** | + | |
+ | **From the manufacturer** | ||
- | 1) Reserve this tool through FBS under "PDMS Tools" | + | This 650-series coater system will accommodate up to ø150mm wafers and 5" |
- | 2) When you arrive, ensure that CDA and vacuum are functional | + | |
- | 3) Program or select your desired recipe (Steps, Spin Speed, Acceleration, | + | Process Controller: The 650-series process controller utilizes a robust microprocessor |
- | 4) Place your substrate, centered, on the chuck and then press the ' | + | |
- | 5) Dispense your resin onto your substrate, try to use as little | + | A Brief Description: |
- | 6) Close the lid, then run your recipe.\\ \\ | + | |
- | 7) When the recipe is complete, open the lid, turn off the vacuum by pressing | + | Laurell' |
- | 8) Repeat for as many samples as required.\\ \\ | + | |
- | 9) When finished, if paper towel liners are very dirty, please replace them. Thank you! | + | The closed bowl design, coupled with the precision of the process controller, allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. The upper plenum closes inside |
+ | |||
+ | A proprietary labyrinth seal protects the motor and control electronics from chemical contamination. This seal provides the process chamber with Nitrogen purge and has been proven to be particle-free on a sub-micron level during field testing. The system's lid is chemically resistant, and only ECTFE-coated | ||
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+ | Need more details? [[https:// | ||
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- | ===== Training Documentation ===== | ||
- | {{: | ||
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spin_coater.1656011782.txt.gz · Last modified: 2022/06/23 19:16 by bdincau