vapor_silanation_rig_sop_new
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vapor_silanation_rig_sop_new [2023/10/20 21:38] – [Operating Guidelines] bdincau | vapor_silanation_rig_sop_new [2023/10/20 21:41] (current) – [Safety] bdincau | ||
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sure the fume hood is closed when you are not working inside of it. Do not handle the silane without | sure the fume hood is closed when you are not working inside of it. Do not handle the silane without | ||
consulting the MSDS. | consulting the MSDS. | ||
+ | |||
+ | The new glass reservoir has about 14x the free liquid surface area as the previous reservoir. This means that the **TMCS evaporates roughly 14x faster than before!** It will reach atmospheric pressure and leak within 2 hours if the silane valve is left open. Therefore, **we recommend that you only open the valve for the first 5 minutes of deposition.** Then fully close the valve and resume your deposition for as long as you need. | ||
===== Trimethylchlorosilane ===== | ===== Trimethylchlorosilane ===== | ||
Synonyms: | Synonyms: |
vapor_silanation_rig_sop_new.1697837891.txt.gz · Last modified: 2023/10/20 21:38 by bdincau