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--- vapor_silanation_rig_sop_new [2023/09/17 01:28] – [References] yanis
+++ vapor_silanation_rig_sop_new [2023/10/20 21:41] (current) – [Safety] bdincau
@@ Line 1: / Line 1: @@
-====== Vapor Silanization Rig Safe Operating Procedures ======
+====== Vapor Silanization Rig Safe Operating Procedures New ======
 /16/23 Yanis Yankauskas yanis@ucsb.edu
 ===== Location =====
@@ Line 10: / Line 10: @@
 sure the fume hood is closed when you are not working inside of it. Do not handle the silane without
 consulting the MSDS.
+The new glass reservoir has about 14x the free liquid surface area as the previous reservoir. This means that the **TMCS evaporates roughly 14x faster than before!** It will reach atmospheric pressure and leak within 2 hours if the silane valve is left open. Therefore, **we recommend that you only open the valve for the first 5 minutes of deposition.** Then fully close the valve and resume your deposition for as long as you need.
 ===== Trimethylchlorosilane =====
 Synonyms:
@@ Line 25: / Line 27: @@
   - Add yourself to the Silane Vapor Deposition Rig Log {{ :tools:vaporsilanationrig:d.jpg?200|}}
   - Place your wafer inside the chamber. Check the O-ring seal. If dirty, wipe with a Kimwipe. Ensure that the O-ring is fully seated in the groove.
-  - Pull a vacuum by turning on the pump and then the red “Vacuum” valve. When the pressure reads about 15 inHg, turn the pump off and close the valve. Test the vacuum by waiting a minute or two and making sure the pressure reading stays steady.  - Turn the Silane flask valve counterclockwise one full turn (the green masking tape should be on top).
+  - Pull a vacuum by turning on the pump and then the red “Vacuum” valve. When the pressure reads about 15 inHg, turn the pump off and close the valve. Test the vacuum by waiting a minute or two and making sure the pressure reading stays steady.
   - Turn on the N2 on the side of the fume hood. You only need to turn the knob once or twice.
-  - Turn the Silane flask valve counterclockwise one full turn (the green masking tape should be on top).
+  - Open the Silane chamber N2 valve until the pressure reads about 5 inHg, then turn on the pump and open the vacuum valve until the pressure reads 15 in Hg. Repeat this cycle 5 times, make sure to turn off the pump once you are done.
-  - Open the Silane chamber N2 valve until the pressure reads about 5 inHg, then turn on the pump and open the vacuum valve until the pressure reads 15 in Hg. Repeat this cycle 5 times, make sure to turn off the pump once you are done.{{ :tools:vaporsilanationrig:k.png?200|}}
+  - Turn the Silane flask valve counterclockwise one full turn (the green masking tape should be on top). The pressure should begin to slowly drop. Wait about 5 minutes, and then close the silane flask valve. There is now plenty of vapor in the chamber. {{ :tools:vaporsilanationrig:k.png?200|}}
   - Flip the sign to “IN USE”.
   - Close the fume hood and set a timer for 40 minutes.
-  - Update the logbook with your end time.
+  - When your cycle is complete, update the logbook with your end time.
-  - When your timer goes off, close the Silane flask valve (turn clockwise until tight).
   - Open the N2 valve until the pressure reads 5 in Hg. Open the vacuum valve until 15 in Hg. Repeat 5 times to purge the chamber again.
   - Close the N2 valve on the side of the fume hood.
@@ Line 41: / Line 42: @@
   * {{ :changing_silane_container_sop.pdf |}}
   * {{ :tools:vaporsilanationrig:tmcs_msds.pdf |}}
-  * {{ :tools:vaporsilanationrig:Silane_Chamber_SOP_23.pdf.pdf |}}
+  * {{ :tools:vaporsilanationrig:Silane_Chamber_SOP_23.pdf |}}