vapor_silanation_rig
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vapor_silanation_rig [2023/01/05 02:02] – haley | vapor_silanation_rig [2023/06/26 22:28] (current) – furst | ||
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- | ====== Vapor Silanation | + | ====== Vapor Silanization |
- | ^ PRIMO ^ | + | ^ Vapor Silanization Rig ^ |
| {{: | | {{: | ||
- | | **Tool Type: | + | | **Tool Type: |
- | | **Location: | + | | **Location: |
- | | **Supervisor** | **Tool Lead** | + | | **Description: |
- | | David Bothman | + | | **Manufacturer: |
- | | (805) 893-4125 | + | |
- | | bothman@cnsi.ucsb.edu | + | |
- | | **Description: | + | Last Updated: |
- | | **Manufacturer: | + | |
- | + | ||
- | Last Updated: | + | |
---- | ---- | ||
===== About ===== | ===== About ===== | ||
- | The vapor silanation | + | The vapor silanization |
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===== Training Documentation ===== | ===== Training Documentation ===== | ||
- | {{ : | + | [[vapor_silanation_rig_sop|Vapor Silanization Rig Safe Operating Procedures]] |
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Synonyms: | Synonyms: | ||
- | TMCS | + | * TMCS |
- | Trimethylchlorosilane | + | |
- | Trimethylsilyl chloride | + | |
Formula: C3H9ClSi | Formula: C3H9ClSi | ||
- | Molecular weight: 108.64 g/mol | + | |
- | CAS-No.: 75-77-4 | + | Molecular weight: 108.64 g/mol |
- | EC-No.: 200-900-5 | + | |
+ | CAS-No.: 75-77-4 | ||
+ | |||
+ | EC-No.: 200-900-5 | ||
This protocol is intended for gas-phase monolayer deposition of a silane to serve as a counter-adhesion agent for glass or silicon substrates. The chemical trimethylchlorosilane will be referred to as silane for the purposes of this protocol. It can be deposited onto silicon and glass substrates and etch metal oxides (e.g. alumina). | This protocol is intended for gas-phase monolayer deposition of a silane to serve as a counter-adhesion agent for glass or silicon substrates. The chemical trimethylchlorosilane will be referred to as silane for the purposes of this protocol. It can be deposited onto silicon and glass substrates and etch metal oxides (e.g. alumina). | ||
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{{: | {{: | ||
- | {{ :: | ||
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vapor_silanation_rig.1672884156.txt.gz · Last modified: 2023/01/05 02:02 by haley