vapor_silanation_rig_sop
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vapor_silanation_rig_sop [2022/08/26 22:38] – [Vapor Silanation Rig Safe Operating Procedures] haley | vapor_silanation_rig_sop [2023/04/04 21:20] – [Location] haley | ||
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- | ====== Vapor Silanation | + | ====== Vapor Silanization |
- | 7/5/22 Haley Holcomb haleyholcomb@ucsb.edu | + | 4/4/23 Haley Holcomb haleyholcomb@ucsb.edu |
===== Location ===== | ===== Location ===== | ||
- | The vapor silanation | + | The vapor silanization |
of the microfluidics lab, Elings 3430. | of the microfluidics lab, Elings 3430. | ||
===== Safety ===== | ===== Safety ===== | ||
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- Close the fume hood and set a timer for 40 minutes. | - Close the fume hood and set a timer for 40 minutes. | ||
- Update the logbook with your end time. | - Update the logbook with your end time. | ||
- | - When your timer goes off, open the nitrogen valve until the pressure reads 5 in Hg. Open the vacuum valve until 15 in Hg. Repeat 5 times to purge the chamber again. | + | - When your timer goes off, close the silane valves (perpendicular). |
- | - Close the silane valves (perpendicular). | + | - Open the nitrogen valve until the pressure reads 5 in Hg. Open the vacuum valve until 15 in Hg. Repeat 5 times to purge the chamber again. |
- Remove your wafer. | - Remove your wafer. | ||
- Flip the sign back to “AVAILABLE” and close the hood. | - Flip the sign back to “AVAILABLE” and close the hood. | ||
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* {{ : | * {{ : | ||
* {{ : | * {{ : | ||
- | * {{ :vapor_silanation_rig_sop_2_.pdf |}} | + | * {{ :updated_vapor_silanation_rig_sop_1_.pdf |silanization rig SOP}} |
vapor_silanation_rig_sop.txt · Last modified: 2023/04/04 21:28 by haley