spin_coater
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spin_coater [2022/03/04 03:41] – Addition of programming handout for spin coater. bassari | spin_coater [2023/01/05 03:39] – [Laurell WS-650M Spin Coater] haley | ||
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- | ^ Laurell WS-650M | + | ^ Spin Coater |
| {{ : | | {{ : | ||
- | | **Tool Type: | + | | **Tool Type: |
- | | **Location: | + | | **Location: |
- | | **Supervisor** | ||
- | | David Bothman | ||
- | | (805) 893-4125 | ||
- | | bothman@cnsi.ucsb.edu | ||
- | | **Description: | + | | **Description: |
- | | **Manufacturer: | + | | **Manufacturer: |
+ | |||
+ | Last updated 1/4/23 Haley | ||
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===== About ===== | ===== About ===== | ||
- | Insert Text Here! | + | Spin coaters facilitate the deposition of thin films by applying centrifugal force to flat substrates, such as wafers or microscope slides. Like most spin coaters, this one uses a vacuum chuck to hold the substrate while it spins. Recipes can be customized, with parameters for spin speed, acceleration rate, spin time, and multiple steps. |
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- | ===== Detailed Specifications | + | ===== Safety Concerns |
- | Insert Text Here! | + | **Pinching Hazard** Be careful when closing and opening the spin coater lid. \\ |
+ | **High Velocity Debris** By default, an interlock prevents the spin coater from operating while the lid is open. Nonetheless, | ||
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- | ===== Safety Concerns | + | ===== Training Documentation |
- | Insert Text Here! | + | {{ : |
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- | ===== Operating Procedures | + | ===== Detailed Specifications |
- | Insert Text Here! | + | **From the manufacturer** |
+ | |||
+ | This 650-series coater system will accommodate up to ø150mm wafers and 5" × 5" (127mm × 127mm) substrates, and features a maximum rotational speed of 12,000 RPM (based on a ø100mm silicon wafer). | ||
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+ | Process Controller: The 650-series process controller utilizes a robust microprocessor and, with the use of its accompanying PC software (written in an object-oriented programming language), it achieves nearly unheard of flexibility both in process definition and use. This controller allows operator interaction in real-time during the process execution including pausing time, stopping and continuing on from that point. The system can and will be continually updated easily and quickly in the field with downloadable firmware revisions. (We plan ahead at Laurell!) | ||
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+ | A Brief Description: | ||
+ | |||
+ | Laurell' | ||
+ | |||
+ | The closed bowl design, coupled with the precision of the process controller, allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. The upper plenum closes inside the base to provide an overlapping seal, and the inside of the lid has a special gutter to channel fluid to the rear of the system to discourage chemicals from accidentally dripping onto the substrate. | ||
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+ | A proprietary labyrinth seal protects the motor and control electronics from chemical contamination. This seal provides the process chamber with Nitrogen purge and has been proven to be particle-free on a sub-micron level during field testing. The system' | ||
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+ | Need more details? [[https:// | ||
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- | ===== Training Documentation ===== | ||
- | {{: | ||
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spin_coater.txt · Last modified: 2023/07/11 16:52 by rylin